Process Equipment : Ion Beam Deposition

Veeco's SPECTOR^® Optical Coating System sets the pace for precision optical thin film deposition. With multiple options in fixtures, target assemblies and a state of the art optical monitoring system, virtually every optical thin film application need is met. SPECTOR is the only system that accommodates either planetary, simple rotation, or flip fixtures within an interchangeable platform. For telecom applications, SPECTOR has the capability to produce high yields of 200, 100, and 50 GHz DWDM filters that feature the narrow passband, wide stopband, steep slope and low insertion loss characteristics required for even the most stringent specifications. For other precision optics applications, SPECTOR produces AR coatings, complex non-quarter wave coatings and ultra low loss laser mirrors with absorption and scatter down to the single digit ppm levels.

Featuring a unique graphical interface with real time and animated movements, the SOURCERER^® system manager offers more control and flexibility than any other ion beam system control package on the market. Using simple commands or easily imported thin film designs, process engineers can develop advanced automated recipes, start the process runs and return when the run is complete. Coupled with Veeco's superior process knowledge and responsive worldwide service organization, we set the standard both before and after the sale.