Metrology & Instrumentation
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Epitaxial Equipment
Epitaxial Equipment : MOCVD Systems
E300 GaNzilla®II MOCVD System
E300 GaNzilla®II MOCVD System
The GaNzilla® II is the world's most advanced MOCVD system for the production of GaN-based materials. The successor to the industry's highest throughput GaNzilla platform, the next generation GaNzilla II system advances Veeco's patented TurboDisc® growth technology to significantly increase the production of premium GaN-based devices. Design and process innovations have lead to the development of a tool that significantly increases wafer yield, material quality and brightness of gallium nitride (GaN)-based light emitting diodes (LEDs). The fast gas switching and rapid temperature ramping capabilities of the GaNzilla II result in the best active layer interfaces for the brightest LEDs. Complete with powerful in-situ monitoring for real-time analysis of wafer temperature and growth rates, plus its unique loadlock design that enables the highest throughput available today, the GaNzilla II offers the flexibility for production of blue and green LEDs and blue lasers.
The GaNzilla® II is the world's most advanced MOCVD system for the production of GaN-based materials. The successor to the industry's highest throughput GaNzilla platform, the next generation GaNzilla II system advances Veeco's patented TurboDisc® growth technology to significantly increase the production of premium GaN-based devices. Design and process innovations have lead to the development of a tool that significantly increases wafer yield, material quality and brightness of gallium nitride (GaN)-based light emitting diodes (LEDs). The fast gas switching and rapid temperature ramping capabilities of the GaNzilla II result in the best active layer interfaces for the brightest LEDs. Complete with powerful in-situ monitoring for real-time analysis of wafer temperature and growth rates, plus its unique loadlock design that enables the highest throughput available today, the GaNzilla II offers the flexibility for production of blue and green LEDs and blue lasers.