Epitaxial Equipment : MBE Systems

The GEN930 is a high performance, cost-effective and flexible molecular beam epitaxy (MBE) system for materials research. Its modular design fits today's R&D budgets, yet it features the flexibility to expand the system's capabilities over time. The system incorporates the core technology of Veeco's GEN II MBE system, which holds numerous GaAs and AlGaAs performance records. With its 11 ports, the GEN930 system provides maximum flexibility in choosing the arrangement of source materials, and in integrating such in-situ monitoring techniques as RHEED, pyrometry, ellipsometry, RGA, optical flux monitoring, and reflectance spectroscopy.