Metrology & Instrumentation
Process Equipment
Epitaxial Equipment
Solutions for a nanoscale world.™

Epitaxial Equipment : MBE Components

MBE Heated Viewports

MBE Heated Viewports

Veeco's Heated Viewports prevent the coating of optical ports in molecular beam epitaxy (MBE) systems. This enables continuous, real-time feedback control of crystal growth via a variety of in-situ monitoring techniques that conventional viewports cannot deliver. The latter become coated, primarily due to As4 that sublimates from solid arsenic sources. Once coated, a conventional viewport cannot be cleaned without venting the MBE system. An optional tabletop DC power supply, equipped with half-rack or full-rack mounting kit, is available. The power supply can heat the viewport from room temperature to >500°C. A 7m fully bakeable cable is included with the power supply.